Description |
Use |
Location |
|
---|---|---|---|
Ultra-Precision Machine Tool |
fabrication of micro- and nano-scale surface structure on the metal stamper |
102 |
|
Proximity Exposure System |
pattern formation of micro-scale electrodes |
CR100 |
|
Scanning Probe Microscope |
Analysis of topology, electric properties and mechanical properties in nano-scale |
102 |
|
Confocal Laser Scanning Microscope |
surface observation of micro-and nano-structures |
102 |
|
UV Roll-to-Roll Nano-imprint System |
fabrication of surface structure using UV-curing resin |
102 |
|
Thermal Roll-to-Roll Nano-imprint System |
fabrication of surface structure using thermoplastics polymer films |
102 |
|
X-ray Diffractometer |
structural analysis of organic thin-film |
103 |